Specific Process Knowledge/Lithography/Baking: Difference between revisions
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Contact bake only. Maximum temperature is hotplate dependent. | Contact bake only. Maximum temperature is hotplate dependent. | ||
Most of these hotplates have been fitted with a top-plate in order to protect the original hotplate surface. With the top-plate, the set point of the controller must be adjusted in order to achieve the correct temperature during the bake: | |||
Actual surface temperature = 0.9 * display value | |||
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