Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Difference between revisions

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	== Silicon sputter==		== Silicon sputter==

	Silicon can be sputter deposited in [[Specific Process Knowledge/Thin film deposition/Wordentec\|Wordentec.]]		Silicon can be sputter deposited in the [[Specific Process Knowledge/Thin film deposition/Wordentec\|Wordentec.]]