Specific Process Knowledge/Thin film deposition/Deposition of TiW: Difference between revisions
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==Sputtering of TiW== | |||
Deposition of TiW alloy can be done in the Wordentec. If necessary, processes may also be developed for depositing TiW in the Lesker sputter setups (contact responsible staff for this). | Deposition of TiW alloy can be done in the [[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]]. If necessary, processes may also be developed for depositing TiW in the Lesker sputter setups (contact responsible staff for this). | ||
* [[/Sputtering of TiW in Wordentec|Sputtering of TiW in Wordentec]] | * [[/Sputtering of TiW in Wordentec|Sputtering of TiW in Wordentec]] | ||