Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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=Process information= | =Process information= | ||
== | ==Information from our suppliers== | ||
[https://www.microchemicals.com/downloads/application_notes.html Application notes] from Microchemicals GmbH, e.g. [https://www.microchemicals.com/technical_information/lithography_trouble_shooting.pdf Lithography Trouble-Shooter] | [https://www.microchemicals.com/downloads/application_notes.html Application notes] from Microchemicals GmbH, e.g. [https://www.microchemicals.com/technical_information/lithography_trouble_shooting.pdf Lithography Trouble-Shooter] | ||
==[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]== | |||
==[[Specific Process Knowledge/Lithography/Coaters|Coaters]]== | |||
==[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]== | |||
==[[Specific_Process_Knowledge/Lithography/UVExposure_Dose|Information on UV Exposure Dose]]== | |||
==[[Specific Process Knowledge/Lithography/Baking|Baking]]== | |||
==[[Specific Process Knowledge/Lithography/Development|Development]]== | |||
==[[Specific Process Knowledge/Lithography/Descum|Descum]]== | |||
==[[Specific Process Knowledge/Lithography/Strip|Stripping Resist]]== | |||
==[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]== | |||