Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
Appearance
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[https://www.microchemicals.com/micro/tds_az_nlof2000_series.pdf Photoresist AZ®nLOF 2020 (TDS)] | [https://www.microchemicals.com/micro/tds_az_nlof2000_series.pdf Photoresist AZ®nLOF 2020 (TDS)] | ||
|[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV|Spin Coater: Gamma UV]] | |[[Specific_Process_Knowledge/Lithography/Coaters#Spin_Coater:_Gamma_UV|Spin Coater: Gamma UV]], | ||
[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|A manual spin coater]] or | [[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|A manual spin coater]] or | ||