Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab has researched the possibilities | The group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab has researched the possibilities | ||
*[[:file:DREM1.pdf Bingdong Chang | *[[:file:DREM1.pdf Bingdong Chang - Infinite etch selectivity and optimized scallop size distribution | ||
with conventional photoresists in an adapted multiplexed Bosch | with conventional photoresists in an adapted multiplexed Bosch | ||
DRIE process]] | DRIE process]] | ||