Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions
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'''Material''': Silicon, epitaxial layers, partially or fully processed wafers, compound semiconductors and beyond. | '''Material''': Silicon, epitaxial layers, partially or fully processed wafers, compound semiconductors and beyond. | ||
'''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD) | '''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD) | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||