Specific Process Knowledge/Characterization/Lifetime scanner MDPmap: Difference between revisions
No edit summary |
No edit summary |
||
| Line 15: | Line 15: | ||
length, L, can be measured also at very low injection levels with a spatial resolution limited | length, L, can be measured also at very low injection levels with a spatial resolution limited | ||
only by the diffusion length of the charge carriers. | only by the diffusion length of the charge carriers. | ||
'''The user manual, the APV and contact information can be found in LabManager:''' | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=338 Lifetime scanner MPDmap info page in LabManager], | |||
== Performance information == | |||
'''Range of lifetimes''': 20 ns to several ms | '''Range of lifetimes''': 20 ns to several ms | ||
| Line 23: | Line 29: | ||
'''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD) | '''Measureable properties''': Carrier lifetime (steady state or non equilibrium (µ -PCD) selectable), photoconductivity (steady state) microwave Photoconductance Decay (µ-PCD) | ||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||