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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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'''Spincoater: Gamma UV:'''
Spincoater: Gamma UV:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417


Developer: TMAH UV-lithography:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417


'''Developer: TMAH UV-lithography:'''
Spincoater: Süss stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417


 
Developer: Stepper:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=417
'''Spincoater: Süss stepper:'''
 
 
'''Developer: Stepper:'''