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| !QC | | !QC |
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| * Open lid @ 110°C:<br />Mean: 109.16°C<br />Uniformity error: 1.12%.
| | https://labmanager.dtu.dk/view_binary.php?type=data&mach=336 |
| * closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%.
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| '''Spincoater: Gamma UV:''' | | '''Spincoater: Gamma UV:''' |
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| * TM16 @ 110°C:<br />Mean: 110.1°C<br />Uniformity error: 0.23%.
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| * TM15 @ 100°C:<br />Mean: 99.5°C<br />Uniformity error: 0.95%.
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| * TM14 @ 90°C:<br />Mean: 88.9°C<br />Uniformity error: 1.01%.
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| * TM13 @ 110°C:<br />Mean: 108.6°C<br />Uniformity error: 1.45%.
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| '''Developer: TMAH UV-lithography:''' | | '''Developer: TMAH UV-lithography:''' |
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| Coming soon.
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| '''Spincoater: Süss stepper:''' | | '''Spincoater: Süss stepper:''' |
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| * TM16 @ 175°C:<br />Mean: 174.4°C<br />Uniformity error: 0.72%.
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| * TM15 @ 175C:<br />Mean: 174.9°C<br />Uniformity error: 0.15%.
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| * TM14 @ 130°C:<br />Mean: 129.8°C<br />Uniformity error: 0.23%.
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| * TM13 @ 130°C:<br />Mean: 129.7°C<br />Uniformity error: 0.20%.
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| * TM12 @ 23°C:<br />Mean: 22.9°C<br />Uniformity error: 0.46%.
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| * TM11 @ 23°C:<br />Mean: 22.8°C<br />Uniformity error: 0.46%.
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| '''Developer: Stepper:''' | | '''Developer: Stepper:''' |
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| * TM14 @ 130°C:<br />Mean: 129.9°C<br />Uniformity error: 0.62%.
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| * TM13 @ 130°C:<br />Mean: 130.1°C<br />Uniformity error: 0.73%.
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| * TM11 @ 20°C:<br />Mean: 20.2°C<br />Uniformity error: 0.10%.
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