Specific Process Knowledge/Lithography/Baking: Difference between revisions
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* Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%. | * Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%. | ||
* Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%. | * Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%. | ||
Hotplate 1:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=122 | |||
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