Specific Process Knowledge/Lithography/Baking: Difference between revisions
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![[Specific_Process_Knowledge/Lithography/Baking#Hotplate:_90-110C|Hotplate: 90-110C]] | ![[Specific_Process_Knowledge/Lithography/Baking#Hotplate:_90-110C|Hotplate: 90-110C]] | ||
![[Specific_Process_Knowledge/Lithography/Baking#Hotplate_1_.28SU8.29.2C_Hotplate_2_.28SU8.29.2C_Hoplate_3.28SU8.29_and_Hotplate_4.28SU8.29|Hotplate 1, 2, 3 and 4(SU8)]] | ![[Specific_Process_Knowledge/Lithography/Baking#Hotplate_1_.28SU8.29.2C_Hotplate_2_.28SU8.29.2C_Hoplate_3.28SU8.29_and_Hotplate_4.28SU8.29|Hotplate 1, 2, 3 and 4 (SU8)]] | ||
![[Specific Process Knowledge/Lithography/Baking#Small_benchtop_hotplates|Small benchtop hotplates]] | ![[Specific Process Knowledge/Lithography/Baking#Small_benchtop_hotplates|Small benchtop hotplates]] | ||
![[Specific Process Knowledge/Lithography/Baking#Gamma_hotplates|Gamma hotplates]] | ![[Specific Process Knowledge/Lithography/Baking#Gamma_hotplates|Gamma hotplates]] | ||
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* Open lid @ 110°C:<br />Mean: 109.16°C<br />Uniformity error: 1.12%. | * Open lid @ 110°C:<br />Mean: 109.16°C<br />Uniformity error: 1.12%. | ||
* closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%. | * closed lid @ 110°C:<br />Mean: 109.54°C<br />Uniformity error: 0.89%. | ||
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* Hotplate 1 @ 100°C:<br />Mean: 96.53°C<br />Uniformity error: 3.34%. | * Hotplate 1 @ 100°C:<br />Mean: 96.53°C<br />Uniformity error: 3.34%. | ||
* Hotplate 2 @ 100°C:<br />Mean: 99.84°C<br />Uniformity error: 3.05%. | * Hotplate 2 @ 100°C:<br />Mean: 99.84°C<br />Uniformity error: 3.05%. | ||
* Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%. | * Hotplate 3 @ 100°C:<br />Mean: 97.07°C<br />Uniformity error: 4.60%. | ||
* Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%. | * Hotplate 4 @ 100°C:<br />Mean: 98.28°C<br />Uniformity error: 3.92%. | ||
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