Specific Process Knowledge/Lithography/Baking: Difference between revisions
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=Comparing baking methods= | =Comparing baking methods= | ||
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Open lid @ 110°C: Mean 109.16°C, uniformity error 1.12%. | Open lid @ 110°C: Mean 109.16°C, uniformity error 1.12%. | ||
closed lid @ 110°C: Mean 109.54°C, uniformity error 0.89%. | closed lid @ 110°C: Mean 109.54°C, uniformity error 0.89%. | ||