Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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This modification is described by SPTS [[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf| High Flow Plenum Upgrade]]. | This modification is described by SPTS [[Media:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf| High Flow Plenum Upgrade]]. | ||
The modification was also done on Pegasus 2 before we started using | The modification was also done on Pegasus 2 and 3 before we started using them. | ||
== Comparison of continuous processes on Pegasus 1== | == Comparison of continuous processes on Pegasus 1== | ||