Specific Process Knowledge/Lithography/Baking: Difference between revisions

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 '''Spincoater: Süss stepper:'''
-Coming soon.
+* TM16 @ 175°C: Mean 174.4°C, uniformity error 0.72%.
+* TM15 @ 175C: Mean 174.9°C, uniformity error 0.15%.
+* TM14 @ 130°C: Mean 129.8°C, uniformity error 0.23%.
+* TM13 @ 130°C: Mean 129.7°C, uniformity error 0.20%.
+* TM12 @ 23°C: Mean 22.9°C, uniformity error 0.46%.
+* TM11 @ 23°C: Mean 22.8°C, uniformity error 0.46%.
 '''Developer: Stepper:'''
-Coming soon.
+* TM14 @ 130°C: Mean 129.9°C, uniformity error 0.62%.
+* TM13 @ 130°C: Mean 130.1°C, uniformity error 0.73%.
+* TM11 @ 20°C: Mean 20.2°C, uniformity error 0.10%.
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-Comming soon.
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-Comming soon.
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