Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

@@ Line 219: / Line 219: @@
 '''Camera field of view (W x H):''' <br>
-'''High Res''' ??µm x ??µm <br>
+'''High Res''' 190 µm x 140 µm <br>
-'''Low Res''' ??µm x ??µm <br>
+'''Low Res''' 640 µm x 480 µm <br>
-'''Overview''' 13mm x 10mm
+'''Overview''' 12 mm x 9 mm
 '''Accessible stage coordinates:''' <br>