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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions

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VisualWikitext
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 60: Line 60:
| 300 mJ/cm<sup>2</sup>  (Jehem Feb 2020)
| 300 mJ/cm<sup>2</sup>  (Jehem Feb 2020)
| 0 (Jehem Feb 2020)
| 0 (Jehem Feb 2020)
|  
| 2 µm (due to stitching)
|  
| PEB: 60s@110°C, Dev: SP60s
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
| Quality
| Quality
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