Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
| Line 58: | Line 58: | ||
|rowspan="2"| 1.5 µm | |rowspan="2"| 1.5 µm | ||
| Fast | | Fast | ||
| | | 300 mJ/cm<sup>2</sup> (Jehem Feb 2020) | ||
| | | 0 (Jehem Feb 2020) | ||
| | | | ||
| | | | ||
| Line 170: | Line 170: | ||
|} | |} | ||
=Features= | =Features= | ||