Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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image:Process A pico.png | Right: Recorded with the Picoscope | image:Process A pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||
Above, one can see the multiplexing of the Bosch process by alternation of the gas flows of | |||
<span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> (that has flow initially at 350 sccm for the first 1.5 second then 550 sccm for 5.5 seconds in the etch phase) and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> (at 200 sccm in the dep phase) | <span style="color:#FFFFFF; background:blue">SF<sub>6</sub></span> (that has flow initially at 350 sccm for the first 1.5 second then 550 sccm for 5.5 seconds in the etch phase) and <span style="background:red">C<sub>4</sub>F<sub>8</sub></span> (at 200 sccm in the dep phase) | ||