Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions
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Spin-off speed will be adjusted if film thickness is outside the limit. | Spin-off speed will be adjusted if film thickness is outside the limit. | ||
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===Standard processes=== | ===Standard processes=== | ||
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*'''(1405) DCH 150mm M35G 1400nm''' Dispense 3ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C | *'''(1405) DCH 150mm M35G 1400nm''' Dispense 3ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C | ||
*'''(1406) DCH 100mm M35G 1400nm''' Dispense 1ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C | *'''(1406) DCH 100mm M35G 1400nm''' Dispense 1ml@1000rpm; spin-off 60s@1310rpm; softbake 90s@130°C | ||
== Equipment performance and process related parameters == | == Equipment performance and process related parameters == | ||