LabAdviser/314/Microscopy 314-307/FIB/Helios: Difference between revisions
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=Dual Beam FEI Helios Nanolab 600= | =Dual Beam FEI Helios Nanolab 600= | ||
The Dual Beam FEI Helios Nanolab 600 is consist of two independent charged particle sources: 1- electrons, 2- gallium ions (Ga+). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU-Cen, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode). This microscope is equipped with the following detectors BSE (backscatter electrons), [http://en.wikipedia.org/wiki/Electron_backscatter_diffraction electron backscatter diffraction (EBSD)] (backscatter diffraction pattern), [http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy Energy-dispersive X-ray spectroscopy (EDS)] (X-Rays), CDEM (secondary ions), etc. | The Dual Beam FEI Helios Nanolab 600 is consist of two independent charged particle sources: 1- electrons, 2- gallium ions (Ga+). FEG-SEM with versatile characterization capabilities. At the time being, this microscope SEM provides highest resolution among all operational SEMs at DTU-Cen, when operated for high resolution imaging (i.e. using low kV , in-lens detector, and in immersion mode). This microscope is equipped with the following detectors BSE (backscatter electrons), [http://en.wikipedia.org/wiki/Electron_backscatter_diffraction electron backscatter diffraction (EBSD)] (backscatter diffraction pattern), [http://en.wikipedia.org/wiki/Energy-dispersive_X-ray_spectroscopy Energy-dispersive X-ray spectroscopy (EDS)] (X-Rays), CDEM (secondary ions), etc. | ||
Gal+ focused ion beam (FIB) provides the possibility of characterization of microstruture by imaging and serial sectioning via sputtering. Since the microscope is equipped with a micro manipulator for high quality TEM sample preparation. | Gal+ focused ion beam (FIB) provides the possibility of characterization of microstruture by imaging and serial sectioning via sputtering. Since the microscope is equipped with a micro manipulator for high quality TEM sample preparation. | ||
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=Equipment performance and process related parameters= | =Equipment performance and process related parameters= | ||
[[File:Helios detector.png|500px]] | [[File:Helios detector.png|500px]] | ||
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