Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
! colspan="3" |Process A | ! colspan="3" |Process A Step 2 parameters | ||
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! width="120" | Parameter | ! width="120" | Parameter | ||