Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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</gallery> | </gallery> | ||
<gallery caption="4 cycles of Process D4 " widths=" | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
Image:PrD4 SPTS.png | Recorded with the SPTS software | Image:PrD4 SPTS.png | Recorded with the SPTS software | ||
Image:PrD4 pico.png |Recorded with the Picoscope | Image:PrD4 pico.png |Recorded with the Picoscope | ||
Revision as of 11:42, 17 March 2020
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
- 4 cycles of Process A
-
Recorded with the SPTS software -
Recorded with the Picoscope
- 4 cycles of Process D4
-
Recorded with the SPTS software -
Recorded with the Picoscope
