Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions

From LabAdviser
← Older editNewer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,416 edits
No edit summary
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,416 edits
Line 3: Line 3:
The Pegasus tools were delivered with a set of standard recipes
The Pegasus tools were delivered with a set of standard recipes


[[Image:PrD4 pico.png |frame|right|x300px|4 cycles of the recipe PrD4 recorded with the Picoscope]]
[[Image:PrD4 pico.png |frame|right|x500px|4 cycles of the recipe PrD4 recorded with the Picoscope]]


[[Image:PrD4 SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]]
[[Image:PrD4 SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]]


[[Image:Process A pico.png |frame|right|x300px|4 cycles of the recipe Prcocess A recorded with the Picoscope]]
[[Image:Process A pico.png |frame|right|x500px|4 cycles of the recipe Prcocess A recorded with the Picoscope]]


[[Image:Process A SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]]
[[Image:Process A SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]]

Revision as of 11:31, 17 March 2020

Process optimization using the Picoscope

The Pegasus tools were delivered with a set of standard recipes

4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/picoscope&oldid=33898"