Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The Pegasus tools were delivered with a set of standard recipes | The Pegasus tools were delivered with a set of standard recipes | ||
[[Image:PrD4 pico.png |frame| | [[Image:PrD4 pico.png |frame|right|x300px|4 cycles of the recipe PrD4 recorded with the Picoscope]] | ||
[[Image:PrD4 SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | [[Image:PrD4 SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||
[[Image:Process A pico.png |frame| | [[Image:Process A pico.png |frame|right|x300px|4 cycles of the recipe Prcocess A recorded with the Picoscope]] | ||
[[Image:Process A SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | [[Image:Process A SPTS.png |frame|left|x300px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||
Revision as of 11:30, 17 March 2020
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
