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Specific Process Knowledge/Lithography/DUVStepperLithography: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
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*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=359 The QC procedure for Spin coater: Süss Stepper]<br>
*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper]<br>
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper]
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper]
{| {{table}}
{| {{table}}
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! QC Recipe:
! QC Recipe:
! (4325) DCH 100mm CSAR 250nm
! (1201) DCH 150mm BARC 65nm
|-  
|-  
|Substrate size
|Substrate size
|4"
|6"
|-  
|-  
| Resist volume
|Resist volume
|2 ml
|3 ml
|-
|-
|Spin-off speed
|Spin-off speed
|2600 rpm
|4700 rpm
|-
|-
|Spin-off time
|Spin-off time
|60 s
|30 s
|-  
|-  
|Soft bake temperature
|Soft bake temperature
|180°C, 1mm proximity
|175°C, contact
|-
|-
|Soft bake time
|Soft bake time
|180 s
|60 s
|-
|-
|}
|}
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