LabAdviser/314/Microscopy 314-307/FIB/Helios: Difference between revisions
Appearance
| Line 19: | Line 19: | ||
Resolution | Resolution | ||
- Electron beam: | - Electron beam: 0.6nm @15kV •0.9nm @1kV | ||
- Ion beam: | - Ion beam: 4.5 nm @ 30 kV @ 1 pA | ||
Attachments | Attachments | ||