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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,527 edits
Line 473: Line 473:
''Sequence names, process parameters, and test results (Sequence no. 3000-3999):''
''Sequence names, process parameters, and test results (Sequence no. 3000-3999):''
*'''(3410) DCH 100mm 5214E 1.5um'''
*'''(3410) DCH 100mm 5214E 1.5um'''
*'''(3411) DCH 100mm 5214E 1.5um HMDS'''
*'''(3411) DCH 100mm 5214E 1.5um HMDS''' see also [[Specific_Process_Knowledge/Lithography/Coaters/Spin_Coater:_Gamma_UV_processing#Quality_Control_.28QC.29|'''QC''']]
*'''(3610) DCH 150mm 5214E 1.5um'''
*'''(3610) DCH 150mm 5214E 1.5um'''
*'''(3611) DCH 150mm 5214E 1.5um HMDS'''
*'''(3611) DCH 150mm 5214E 1.5um HMDS'''
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