Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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|4" wafer. 9 points on one wafer, exclusion zone 5mm. | |4" wafer. 9 points on one wafer, exclusion zone 5mm. | ||
|} | |} | ||
==AZ "5206E" coating (syringe)== | ==AZ "5206E" coating (syringe)== | ||