Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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|Soft bake temperature | |Soft bake temperature | ||
|110°C contact | |110°C, contact | ||
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|Soft bake time | |Soft bake time | ||
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|Soft bake temperature | |Soft bake temperature | ||
|90°C contact | |90°C, contact | ||
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|Soft bake time | |Soft bake time | ||