Jump to content

Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 68: Line 68:
|-  
|-  
|Soft bake temperature
|Soft bake temperature
|110°C contact
|110°C, contact
|-
|-
|Soft bake time
|Soft bake time
Line 116: Line 116:
|-  
|-  
|Soft bake temperature
|Soft bake temperature
|90°C contact
|90°C, contact
|-
|-
|Soft bake time
|Soft bake time