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==Completed Projects==
==Completed Projects==
*[[/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications|Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications]] - ''initiated November 2015''
*[[/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications|Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications]] - ''initiated November 2015''
*[[/Microfabrication of Hard x-ray Lenses|Microfabrication of Hard x-ray Lenses]] - ''initiated December 2012''
*[[/Microfabrication of Hard x-ray Lenses|Microfabrication of Hard x-ray Lenses]] - ''initiated December 2012'' - Frederic Stöhr
*[[/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition|Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition]] - ''initiated November 2013''
*[[/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition|Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition]] - ''initiated November 2013'' - Evgeniy Shkondin
*[[/Nanoscale characterization of ultra-thin metal films for nanofabrication applications|Nanoscale characterization of ultra-thin metal films for nanofabrication applications]] - ''initiated November 2014''
*[[/Nanoscale characterization of ultra-thin metal films for nanofabrication applications|Nanoscale characterization of ultra-thin metal films for nanofabrication applications]] - ''initiated November 2014''
*[[/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes|Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes]] - ''initiated November 2014''
*[[/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes|Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes]] - ''initiated November 2014''
*[[/Nanofabrication of Inductive Components for Integrated Power Supply On Chip|Nanofabrication of Inductive Components for Integrated Power Supply On Chip]] - ''initiated November 2014''
*[[/Nanofabrication of Inductive Components for Integrated Power Supply On Chip|Nanofabrication of Inductive Components for Integrated Power Supply On Chip]] - ''initiated November 2014''