Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
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|10Å to 1µm | |10Å to 1µm | ||
|10Å to 0.5µm | |10Å to 0.5µm | ||
|10Å to 0.5µm (not on all wafers) | |10Å to 0.5µm (0.5µm not on all wafers) | ||
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| Deposition rate | | Deposition rate | ||