LabAdviser/Technology Research/Microfabrication of X-ray optical elements: Difference between revisions
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:Microelectronic Engineering, 209, pp.60-65 (2019) [https://doi.org/10.1016/j.mee.2019.03.007] | :Microelectronic Engineering, 209, pp.60-65 (2019) [https://doi.org/10.1016/j.mee.2019.03.007] | ||
*;'''Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures''' | |||
:<u>Silvestre, Chantal M. </u>, Jansen, H., Hansen, O., | |||
:Microelectronic Engineering, 223, 111228 (2020) [https://doi.org/10.1016/j.mee.2020.111228] | |||
===Publication as co-author=== | ===Publication as co-author=== | ||