Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions

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	Thermal oxidation can done at temperatures up to 1150 C (but only 1100 C in C1 and Multipurpose Anneal ~~furnace and 1000 C in the Noble~~ furnace). At these very high temperatures, the quartz tube in the furnaces might start to deform, so therefore the oxidation times are restricted:		Thermal oxidation can done at temperatures up to 1150 C (but only 1100 C in C1 furnace and the Multipurpose Anneal furnace). At these very high temperatures, the quartz tube in the furnaces might start to deform, so therefore the oxidation times are restricted: