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| = Purpose, location and technical specifications = | | = Purpose, location and technical specifications = |
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| [[File:Under_construction.png|thumb|300x300px|'HF vapour phase etcher 01' is not in the cleanroom yet]] | | [[File:Under_construction.png|thumb|300x300px|Figure 1: 'HF vapour phase etcher 01' is not in the cleanroom yet]] |
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| The Raith Elphy system is a pattern generator built onto the [[Specific_Process_Knowledge/Characterization/SEM:_Scanning_Electron_Microscopy/Leo|LEO Scanning Electron Microscope ]] (SEM) in cleanroom F-2. All users must therefore acquire license to use the SEM LEO before acquiring license to the Raith Elphy system. | | The 'HF Vapour Phase Etch' machine (a Primaxx uEtch from SPTS) is a single wafer (or pieces) HF vapor etch machine designed for etching sacrificial silicon oxide layers, primarily to release silicon microstructures in MEMS devices. The process uses anhydrous hydrogen fluoride (HF) gas as etchant and ethanol vapor as catalyst. In this way silicon dioxide can be etched in a dry process and the problems associated with wet etching is avoided (small structures collapse when they are underetched due to surface tension of water). |
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| Remember that you need '''''two additional trainings''''' from Nanolab staff in order to be able to use this tool for lithography. Please refer to the [[Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy|General Page]] for further information.
| | The etch gas and catalyst easily diffuses into "hidden spaces" making e.g. long undercuts, membrane and resonator release etches feasible. |
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| The Raith ELPHY Quantum software (from now on, Elphy) is installed on the Raith pc located right next to the LEO SEM pc. The workstation is more or less independent from the LEO itself. If you try to access Elphy without properly setting up the microscope first, it will usually return a communication error, but it would still be partially functional e.g. to prepare layouts and position lists. When you want to do actual patterning, you will need to operate on both computers at the same time. | |
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| The pc has limited access to internet and the network. To import and export files on the Raith pc, two options are available:
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| *Send the files to yourself on your DTU email. You can then access and download them from the DTU [http://mail.win.dtu.dk webmail page]
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| *For more advanced functionality, use the [http://remote.dtu.dk Citrix page] with your DTU login. You can then use a Remote Desktop (DTU Office 2013 IE11 Desktop) or an App (DCH-LAB Windows Explorer) to operate and transfer files between the local pc and your personal M: drive.
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| = Preliminary steps = | | = Preliminary steps = |
