Specific Process Knowledge/Characterization/XRD: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b> | |style="background:WhiteSmoke; color:black"|<b>XRD SmartLab</b> | ||
|style="background:WhiteSmoke; color:black"|<b>XRD Powder</b> | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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*Roughness | *Roughness | ||
*Density | *Density | ||
|style="background:WhiteSmoke; color:black"| | |||
*Phase ID | |||
*Crystal Size | |||
*Crystallinity | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="6"|X-ray generator | !style="background:silver; color:black" align="center" valign="center" rowspan="6"|X-ray generator | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
3 kW | 3 kW | ||
|style="background:WhiteSmoke; color:black"| | |||
600 W | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
20 to 45 kV | 20 to 45 kV | ||
|style="background:WhiteSmoke; color:black"| | |||
40 kV | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
2 to 60 mA | 2 to 60 mA | ||
|style="background:WhiteSmoke; color:black"| | |||
15 mA | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Type | Type | ||
|style="background:WhiteSmoke; color:black"| | |||
Sealed tube | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Sealed tube | Sealed tube | ||
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Target | Target | ||
|style="background:WhiteSmoke; color:black"| | |||
Cu | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Cu | Cu | ||
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Focus size | Focus size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0. | 0.4 mm x 8 mm (Line/Point) | ||
|style="background:WhiteSmoke; color:black"| | |||
0.4 mm x 12 mm (Line) | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer | !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Goniometer | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
incident / receiver coupled or independent | incident / receiver coupled or independent | ||
|style="background:WhiteSmoke; color:black"| | |||
incident / receiver coupled | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
300 mm | 300 mm | ||
|style="background:WhiteSmoke; color:black"| | |||
145 mm | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.0001° (0.36") | 0.0001° (0.36") | ||
|style="background:WhiteSmoke; color:black"| | |||
0.001° (3.6") | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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*X,Y:±50 mm for a 100 mm wafer | *X,Y:±50 mm for a 100 mm wafer | ||
*Rx,Ry:-5~+5° | *Rx,Ry:-5~+5° | ||
|style="background:WhiteSmoke; color:black"| | |||
Fixed with rotation | |||
|- | |- | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
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Diameter: 150 mm | Diameter: 150 mm | ||
Thickness: 0~21 mm | Thickness: 0~21 mm | ||
|style="background:WhiteSmoke; color:black"| | |||
Powders | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Optics | ||
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*Soller slit | *Soller slit | ||
*Variable divergence slit | *Variable divergence slit | ||
|style="background:WhiteSmoke; color:black"| | |||
0.04° soller slit | |||
Ni and Cu filter | |||
Divergence slits | |||
Beam mask | |||
|- | |- | ||
|style="background:LightGrey; color:black"|Receiver side | |style="background:LightGrey; color:black"|Receiver side | ||
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*Parallel slit analysers (PSA) | *Parallel slit analysers (PSA) | ||
*Ge(220)x2 analyser | *Ge(220)x2 analyser | ||
|style="background:WhiteSmoke; color:black"| | |||
0.04° soller slit | |||
Ni filter | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
up to 150 mm wafers | up to 150 mm wafers | ||
|style="background:WhiteSmoke; color:black"| | |||
Only for powders | |||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
All materials | All materials | ||
|style="background:WhiteSmoke; color:black"| | |||
All materials have to be approved | |||
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|} | |} | ||
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Revision as of 14:55, 5 February 2020
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XRD SmartLab
The Rigaku SmartLab is an advanced XRD for measuring on thin films. All thin films can be measured without fixating the sample, as the system has a so called In-Plane arm.
The user manual(s), user APV(s), technical information, and contact information can be found in LabManager:
Software for analysis
The software packages used for data analysis are available on the equipment computer, but we recommend that you install it on your personal computer. To run the software you need a USB dongle with a license on, these can be borrowed from Rebecca and Kristian in room 347-077. We only have 9 dongles available, so when you are done please return the dongle to Nanolab.
The software can be found on "CleanroomDrive\_Equipment\XRD\Rigaku software\RILauncher", it should be possible to install the software without a dongle. To use the software you have to log in. The user is: Administrator. There is no password.
Equipment | XRD SmartLab | XRD Powder | |
---|---|---|---|
Purpose | Crystal structure analysis and thin film thickness measurement |
|
|
X-ray generator |
Maximum rated output |
3 kW |
600 W |
Rated tube voltage |
20 to 45 kV |
40 kV | |
Rated tube current |
2 to 60 mA |
15 mA | |
Type |
Sealed tube |
Sealed tube | |
Target |
Cu |
Cu | |
Focus size |
0.4 mm x 8 mm (Line/Point) |
0.4 mm x 12 mm (Line) | |
Goniometer |
Scanning mode |
incident / receiver coupled or independent |
incident / receiver coupled |
Goniomenter radius |
300 mm |
145 mm | |
Minimum step size |
0.0001° (0.36") |
0.001° (3.6") | |
Sample stage |
|
Fixed with rotation | |
Sample size |
Diameter: 150 mm Thickness: 0~21 mm |
Powders | |
Optics | Incident side |
|
0.04° soller slit Ni and Cu filter Divergence slits Beam mask |
Receiver side |
|
0.04° soller slit Ni filter | |
Substrates | Substrate size |
up to 150 mm wafers |
Only for powders |
Allowed materials |
All materials |
All materials have to be approved |