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Specific Process Knowledge/Etch/III-V RIE/III V RIE ETCHES: Difference between revisions

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! width="10%" |ZEP520A
! width="10%" |ZEP520A
! width="10%" |Negative DUV: UVN 2030-0.5
! width="10%" |Negative DUV: UVN 2030-0.5
! width="40%" |Comments/links
! width="60%" |Comments/links
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!SiO2_602  
!SiO2_602