Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions

Revision as of 10:40, 4 February 2020 view source Pevo (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 2,366 edits →Thermal ALD and PEALD ← Older edit		Revision as of 10:42, 4 February 2020 view source Pevo (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 2,366 edits →Process information Newer edit →
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	*[[/Standard recipes on the ALD2 tool\|Standard recipes on the ALD 2 (PEALD)]]		*[[/Standard recipes on the ALD2 tool\|Standard recipes on the ALD 2 (PEALD)]]


	'''Results from the acceptance test:'''		'''Results from the acceptance test:'''