Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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==Process knowledge== | ==Process knowledge== | ||
* | *Wet oxidation.. More information can be found [[Specific Process Knowledge/Thermal Process/Oxidation/Wet oxidation C1 furnace|here]] | ||
* | *Dry oxidation. More information can be found on the [[Specific Process Knowledge/Thermal Process/Oxidation|oxidation page]] | ||
*Annealing | *Annealing. More information can be found at the [[Specific Process Knowledge/Thermal Process/Annealing|annealing page]] | ||
==Overview of the performance of Anneal Oxide furnace and some process related parameters== | ==Overview of the performance of Anneal Oxide furnace and some process related parameters== | ||