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Specific Process Knowledge/Thermal Process/BCB Curing Oven: Difference between revisions

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The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.
The BCB Curing Oven is mainly used for curing of BCB (bisbenzocyclobutene) and for alloying of metals in a nitrogen atmosphere.


During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample. The furnace is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.
During processing the furnace is rapidly heated by use of eight halogen lamps situated below the sample.  
The furnace is purged with a nitrogen flow (high or low flow). Samples are processed at atmospheric pressure or at vacuum.