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<!--LabAdviser is a process handbook for equipment and processes at the cleanroom facilities and the characterisation facilities in building 314/307. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for DTU Nanolab employees. If you need further information about certain machinery or processes, please contact Nanolab personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]-->
<!--LabAdviser is a process handbook for equipment and processes at the cleanroom facilities and the characterisation facilities in building 314/307. The function and capacity of each piece of equipment is described and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to '''log in with your DTU login'''. LabAdviser is only editable for DTU Nanolab employees. If you need further information about certain machinery or processes, please contact Nanolab personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: [mailto:labadviser@nanolab.dtu.dk labadviser@nanolab.dtu.dk]-->
LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, '''please take a look at our homepage''' [[https://www.nanolab.dtu.dk/english]]. You can also take a '''virtuel tour of the DTU Nanolab cleanroom facility''' here [[https://my.matterport.com/show/?m=n7rBdnKvgxd ]] or explore our '''YouTube channel''' with a varity of training videos here [[https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]] <br>
LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, '''please take a look at our homepage''' [[https://www.nanolab.dtu.dk/english]]. You can also take a '''virtuel tour of the DTU Nanolab cleanroom facility''' [[https://my.matterport.com/show/?m=n7rBdnKvgxd ]] or explore our '''YouTube channel''' [[https://www.youtube.com/channel/UCJhdUTUJRDNODNiC3V95RQQ]] with a selection of training videos <br>
   
   
LabAdviser contains information about  
LabAdviser contains information about  

Revision as of 11:50, 29 January 2020

LabAdviser is a wiki accessible for users of the DTU Nanolab facilities. If you are not a current user, please take a look at our homepage [[1]]. You can also take a virtuel tour of the DTU Nanolab cleanroom facility [[2]] or explore our YouTube channel [[3]] with a selection of training videos

LabAdviser contains information about

  • equipment at DTU Nanolab that covers micro and nano fabrication in the cleanroom facility in building 346 and surroundings (in building 346 and 347) and characterization equipment, primarily electron microscopy, at building 314 and 307.
  • fabrication steps in micro and nano fabrication that takes place at the cleanroom fabrication facility and surroundings and
  • electron microscopy methods that takes place at building 314/307.

An overview of the equipment in these facilities can be found and some fabrication process flows and singles fabrication steps are described. In general LabAdviser is meant to advise you to the right equipment and to advise you to a good starting point for your micro and nano fabrication steps as for your electron microscopy work. This should not be replacing communication with the staff of the facilities but we recommend it as a good starting point before contacting the staff. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for the staff of the facilities. If you need further information about certain machinery or processes, please contact the relevant staff. Any feedback or input you might have to LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@nanolab.dtu.dk


News in LabAdviser:


Contents




Overview of micro and nano fabrication steps - a guide to where you can find fabrication information in LabAdviser:

- - -
Clean your sample Dry your sample Create a thin film on your sample Dope your sample
Thermal treatment of your sample Make a mask on your sample Transfer pattern to your sample Define your structure directly
Bond your samples together Characterize your sample Pack your sample Process flow examples


Contact Information for the DTU Nanolab fabrication part

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).

Subject Email Description
Training and Process Flow training@nanolab.dtu.dk All requests regarding equipment training and process flows. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading e-beamload@nanolab.dtu.dk Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries nanolabsupport@nanolab.dtu.dk Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line.

Note: Requests are commonly answered within 2 workdays.
Metal Wishes metal@nanolab.dtu.dk Requests for change of metal in Thin Film Deposition equipment.
See current and future materials in statuslog of the respective machines.


Lesker - status log
E-Beam Evaporator (Temescal) - status log
E-Beam Evaporator (10-pockets) - status log
Sputter-System Metal-Oxide(PC1) - status log
Sputter-System Metal-Nitride(PC3) - logbook

For requests regarding Wordentec, please contact the Thin Film group directly.

Gas-related Requests DCH-Gas@nanolab.dtu.dk All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Commercial Inquiries sales@nanolab.dtu.dk For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc


DTU Nanolab Fabrication Cleanroom Naming and Phone Numbers



Room number Where in the room Phone number
A-1 At III-V RIE 55 804
Ax2 At the Lesker 55 815
A-5 In the corner near the furnace/plasma asher 55 803
B-1 In the corridor 55 806
C-1 At the corridor 55 808
D-1 The entrance room 55 703
D-3 At the KOH 55 940
E-1 By the e-beam computers 55 943
E-5/E-4 By the MLAs in E-5, by KS aligner in E-4 55 946
E-6 Furnace 6" 55 948
F-1 III-V growth 55 949
F-2 Next to Dektak-XTA 55 941
F-3 DUV Stepper 55 947
901 Injection molder room in the basement 55 812


DTU Nanolab building 314 and Phone Numbers




Room number Description Phone number
314-011 QFEG 200 Cryo ESEM 56 406
314-014 Tecnai T20 56 407
314-032 Prep room No phone
314-034 AFEG 250 ESEM 56 414
314-037 Titan ETEM 56 408
314-040 Prep room (Bio) 56 413
314-042 Titan ATEM 56 409
314-060 Nova NanoSEM 600 56 412
314-061 Helios Nanolab 56 411