Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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*15 nm to 70 µm (depending of the material) | *15 nm to 70 µm (depending of the material) | ||
*min 100nm (to measure n and k) | *min 100nm (to measure n and k) | ||
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|style="background:LightGrey; color:black"|Probe spot size | |||
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*6 mm | |||
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|style="background:LightGrey; color:black"|Sample orientation | |||
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*Face down | |||
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!style="background:silver; color:black" align="left"|Process parameter range | !style="background:silver; color:black" align="left"|Process parameter range | ||