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| *Recipe 1: baseline prime process with 5 min HMDS priming time | | *Recipe 1: baseline prime process with 5 min HMDS priming time |
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| ==Spin track 1 + 2==
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| [[Image:HMDS spintrack.jpg|300x300px|thumb|HMDS module in spin track 1 + 2 in C-1.]]
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| '''The user manual, user APV, and contact information can be found in LabManager:'''
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| [http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 Spin track 1 + 2 labmanager page]
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| '''Additional information about the spin track and processes can be found in Labadviser:'''
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| [http://labadviser.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/Coaters#Spin_Track_1_.2B_2 Spin track 1 + 2 labadviser page]
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| <br clear="all" /> | | <br clear="all" /> |
