Jump to content

Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions

Choi (talk | contribs)
No edit summary
Choi (talk | contribs)
Line 43: Line 43:
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
!Link to safety APV and KBA
!Link to safety APV and SDS
|[http://labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here]  
|[http://labmanager.danchip.dtu.dk/d4Show.php?id=1892&mach=130 see APV here]  
[http://kemibrug.dk/KBA/CAS/116297/?show_KBA=1&portaldesign=1 see KBA here]  
[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESk1OTEZKTVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K see SDS here (requires login)]  
|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"