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Specific Process Knowledge/Etch/Wet Titanium Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, danchip
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Choi (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, danchip
641 edits
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Chemical solution'''
|'''Chemical solution'''
|HF:NH<sub>4</sub>F
|HF : NH<sub>4</sub>F : NH<sub>4</sub>HF<sub>2</sub>
|NH<sub>3</sub>OH:H<sub>2</sub>O<sub>2</sub>:H<sub>2</sub>O - 1:1:5
|H<sub>2</sub>O : NH<sub>4</sub>OH : H<sub>2</sub>O<sub>2</sub> - 5:1:1
|-
|-


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