Specific Process Knowledge/Imprinting: Difference between revisions
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==Imprint resist== | ==Imprint resist== | ||
Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom. | |||
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%" | {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%" | ||