Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano3: Difference between revisions
No edit summary |
|||
| Line 1: | Line 1: | ||
<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!-- Ok, jmli 2020-0120 --> | |||
== The Sinano3.0 recipe == | == The Sinano3.0 recipe == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||