Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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== Stylus Profiler: Dektak150 == | |||
[[image:Dektak150.JPG|300x300px|right|thumb|The profiler placed in 347-183 (Dektak150).]] | |||
The stylus profiler Dektak150 is intended for profile measurements on samples outside the cleanroom. | |||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 Sylus profiler:Dektak150 in LabManager] | |||
The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network. | |||
===Equipment performance and process related parameters=== | |||
{| border="2" cellspacing="0" cellpadding="10" | |||
|- | |||
!style="background:silver; color:black;" align="left"|Purpose | |||
|style="background:LightGrey; color:black"|Profiler for measuring micro structures||style="background:WhiteSmoke; color:black"| | |||
*Single line profiles | |||
*Surface roughness on a line scan | |||
|- | |||
!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Performance | |||
|style="background:LightGrey; color:black"|Scan range x y | |||
|style="background:WhiteSmoke; color:black"| | |||
Line scan x: 50 µm to 55 mm in a single scan | |||
|- | |||
|style="background:LightGrey; color:black"|Scan range z | |||
|style="background:WhiteSmoke; color:black"| | |||
50 Å to 1 mm | |||
|- | |||
|style="background:LightGrey; color:black"|Resolution x y | |||
|style="background:WhiteSmoke; color:black"| | |||
Down to 0.003µm | |||
|- | |||
|style="background:LightGrey; color:black"|Resolution z | |||
|style="background:WhiteSmoke; color:black"| | |||
1Å (@65kÅ), 10Å (@655 kÅ), 80 Å (@5240 kÅ), 160 Å (@1mm) | |||
|- | |||
|style="background:LightGrey; color:black"|Maximum sample thickness | |||
|style="background:WhiteSmoke; color:black"| | |||
100mm | |||
|- | |||
|- | |||
!style="background:silver; color:black" align="left"|Hardware settings | |||
|style="background:LightGrey; color:black"|Tip radius | |||
|style="background:WhiteSmoke; color:black"| | |||
*5 µm 45<sup>o</sup> cone | |||
*0.2 µm 45<sup>o</sup> cone on request | |||
|- | |||
!style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
|style="background:WhiteSmoke; color:black"| | |||
*Up to 6" | |||
|- | |||
| style="background:LightGrey; color:black"|Substrate materials allowed | |||
|style="background:WhiteSmoke; color:black"| | |||
*In principle all materials | |||
|- | |||
|} | |} | ||
==Comparing the profilers== | ==Comparing the profilers== | ||
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||