Specific Process Knowledge/Thermal Process/Oxidation/Standard oxidation recipes: Difference between revisions

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	The oxidation furnaces in the cleanroom are being used for dry and wet oxidation of silicon wafers.		The oxidation furnaces in the cleanroom are being used for dry and wet oxidation of silicon wafers.

	On this page the steps in the standard oxidation recipes on the furnaces will be ~~listet~~.		On this page the steps in the standard oxidation recipes on the furnaces will be listed.