Specific Process Knowledge/Thin film deposition/Deposition of ZnO: Difference between revisions
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ZnO can be deposited by Sputtering process and atomic layer deposition (ALD). In the chart below you can compare the different deposition equipment. | ZnO can be deposited by Sputtering process and atomic layer deposition (ALD). In the chart below you can compare the different deposition equipment. | ||
*[[Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ZnO deposition using ALD|ZnO deposition using ALD]] | |||
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